4/19/2011	12:00:10 AM	H2 valve closed
4/19/2011	12:00:10 AM	BCl3 valve closed
4/19/2011	12:00:10 AM	PH3 valve closed
4/19/2011	12:00:10 AM	SiCl4 pre valve closed
4/19/2011	12:00:10 AM	SiCl4 post valve closed
4/19/2011	12:00:10 AM	Bubbler valve closed
4/19/2011	12:00:10 AM	Helium valve opened
4/19/2011	12:00:10 AM	Main Vac valve opened
4/19/2011	12:00:10 AM	Bypass valve opened
4/19/2011	12:00:10 AM	Helium MFC set to  100.000000
4/19/2011	12:00:10 AM	H2 MFC set to  0.000000
4/19/2011	12:00:10 AM	BCl3 MFC set to  0.000000
4/19/2011	12:00:10 AM	PHl3 MFC set to  0.000000
4/19/2011	12:00:10 AM	SiCl4 MFC set to  0.000000
4/19/2011	12:00:10 AM	Bypass solenoid MFC set to  0.000000
4/19/2011	12:00:10 AM	Tube furnace set to 0
4/19/2011	12:01:10 AM	Helium valve closed
4/19/2011	12:01:10 AM	H2 valve closed
4/19/2011	12:01:10 AM	BCl3 valve closed
4/19/2011	12:01:10 AM	PH3 valve closed
4/19/2011	12:01:10 AM	SiCl4 pre valve closed
4/19/2011	12:01:10 AM	SiCl4 post valve closed
4/19/2011	12:01:10 AM	Bubbler valve closed
4/19/2011	12:01:10 AM	Main Vac valve opened
4/19/2011	12:01:10 AM	Bypass valve opened
4/19/2011	12:01:10 AM	Helium MFC set to  0.000000
4/19/2011	12:01:10 AM	H2 MFC set to  0.000000
4/19/2011	12:01:10 AM	BCl3 MFC set to  0.000000
4/19/2011	12:01:10 AM	PHl3 MFC set to  0.000000
4/19/2011	12:01:10 AM	SiCl4 MFC set to  0.000000
4/19/2011	12:01:10 AM	Bypass solenoid MFC set to  0.000000
4/19/2011	12:01:10 AM	Tube furnace set to 0
4/19/2011	12:02:10 AM	H2 valve closed
4/19/2011	12:02:10 AM	BCl3 valve closed
4/19/2011	12:02:10 AM	PH3 valve closed
4/19/2011	12:02:10 AM	SiCl4 pre valve closed
4/19/2011	12:02:10 AM	SiCl4 post valve closed
4/19/2011	12:02:10 AM	Bubbler valve closed
4/19/2011	12:02:10 AM	Helium valve opened
4/19/2011	12:02:10 AM	Main Vac valve opened
4/19/2011	12:02:10 AM	Bypass valve opened
4/19/2011	12:02:10 AM	Helium MFC set to  100.000000
4/19/2011	12:02:10 AM	H2 MFC set to  0.000000
4/19/2011	12:02:10 AM	BCl3 MFC set to  0.000000
4/19/2011	12:02:10 AM	PHl3 MFC set to  0.000000
4/19/2011	12:02:10 AM	SiCl4 MFC set to  0.000000
4/19/2011	12:02:10 AM	Bypass solenoid MFC set to  0.000000
4/19/2011	12:02:10 AM	Tube furnace set to 0
4/19/2011	12:03:10 AM	Helium valve closed
4/19/2011	12:03:10 AM	H2 valve closed
4/19/2011	12:03:10 AM	BCl3 valve closed
4/19/2011	12:03:10 AM	PH3 valve closed
4/19/2011	12:03:10 AM	SiCl4 pre valve closed
4/19/2011	12:03:10 AM	SiCl4 post valve closed
4/19/2011	12:03:10 AM	Bubbler valve closed
4/19/2011	12:03:10 AM	Main Vac valve opened
4/19/2011	12:03:10 AM	Bypass valve opened
4/19/2011	12:03:10 AM	Helium MFC set to  0.000000
4/19/2011	12:03:10 AM	H2 MFC set to  0.000000
4/19/2011	12:03:10 AM	BCl3 MFC set to  0.000000
4/19/2011	12:03:10 AM	PHl3 MFC set to  0.000000
4/19/2011	12:03:10 AM	SiCl4 MFC set to  0.000000
4/19/2011	12:03:10 AM	Bypass solenoid MFC set to  0.000000
4/19/2011	12:03:10 AM	Tube furnace set to 0
4/19/2011	12:04:10 AM	H2 valve closed
4/19/2011	12:04:10 AM	BCl3 valve closed
4/19/2011	12:04:10 AM	PH3 valve closed
4/19/2011	12:04:10 AM	SiCl4 pre valve closed
4/19/2011	12:04:10 AM	SiCl4 post valve closed
4/19/2011	12:04:10 AM	Bubbler valve closed
4/19/2011	12:04:10 AM	Helium valve opened
4/19/2011	12:04:10 AM	Main Vac valve opened
4/19/2011	12:04:10 AM	Bypass valve opened
4/19/2011	12:04:10 AM	Helium MFC set to  100.000000
4/19/2011	12:04:10 AM	H2 MFC set to  0.000000
4/19/2011	12:04:10 AM	BCl3 MFC set to  0.000000
4/19/2011	12:04:10 AM	PHl3 MFC set to  0.000000
4/19/2011	12:04:10 AM	SiCl4 MFC set to  0.000000
4/19/2011	12:04:10 AM	Bypass solenoid MFC set to  0.000000
4/19/2011	12:04:11 AM	Tube furnace set to 0
4/19/2011	12:05:11 AM	Helium valve closed
4/19/2011	12:05:11 AM	H2 valve closed
4/19/2011	12:05:11 AM	BCl3 valve closed
4/19/2011	12:05:11 AM	PH3 valve closed
4/19/2011	12:05:11 AM	SiCl4 pre valve closed
4/19/2011	12:05:11 AM	SiCl4 post valve closed
4/19/2011	12:05:11 AM	Bubbler valve closed
4/19/2011	12:05:11 AM	Main Vac valve opened
4/19/2011	12:05:11 AM	Bypass valve opened
4/19/2011	12:05:11 AM	Helium MFC set to  0.000000
4/19/2011	12:05:11 AM	H2 MFC set to  0.000000
4/19/2011	12:05:11 AM	BCl3 MFC set to  0.000000
4/19/2011	12:05:11 AM	PHl3 MFC set to  0.000000
4/19/2011	12:05:11 AM	SiCl4 MFC set to  0.000000
4/19/2011	12:05:11 AM	Bypass solenoid MFC set to  0.000000
4/19/2011	12:05:11 AM	Tube furnace set to 0
4/19/2011	12:05:12 AM	Run finished at 12:05 AM
4/19/2011	12:05:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/19/2011	12:06:41 AM	Recipe started at 12:06 AM
4/19/2011	12:06:41 AM	BCl3 valve closed
4/19/2011	12:06:41 AM	PH3 valve closed
4/19/2011	12:06:41 AM	SiCl4 pre valve closed
4/19/2011	12:06:41 AM	SiCl4 post valve closed
4/19/2011	12:06:41 AM	Main Vac valve closed
4/19/2011	12:06:41 AM	Bypass valve closed
4/19/2011	12:06:41 AM	Bubbler valve closed
4/19/2011	12:06:41 AM	Helium valve opened
4/19/2011	12:06:41 AM	H2 valve opened
4/19/2011	12:06:41 AM	Helium MFC set to  190.000000
4/19/2011	12:06:41 AM	H2 MFC set to  10.000000
4/19/2011	12:06:41 AM	BCl3 MFC set to  0.000000
4/19/2011	12:06:41 AM	PHl3 MFC set to  0.000000
4/19/2011	12:06:41 AM	SiCl4 MFC set to  0.000000
4/19/2011	12:06:41 AM	Bypass solenoid MFC set to  0.000000
4/19/2011	12:06:41 AM	Tube furnace set to 0
4/19/2011	12:10:06 AM	BCl3 valve closed
4/19/2011	12:10:06 AM	PH3 valve closed
4/19/2011	12:10:06 AM	SiCl4 pre valve closed
4/19/2011	12:10:06 AM	SiCl4 post valve closed
4/19/2011	12:10:06 AM	Main Vac valve closed
4/19/2011	12:10:06 AM	Bypass valve closed
4/19/2011	12:10:06 AM	Helium valve opened
4/19/2011	12:10:06 AM	H2 valve opened
4/19/2011	12:10:06 AM	Bubbler valve opened
4/19/2011	12:10:06 AM	Helium MFC set to  47.500000
4/19/2011	12:10:06 AM	H2 MFC set to  2.500000
4/19/2011	12:10:06 AM	BCl3 MFC set to  0.000000
4/19/2011	12:10:06 AM	PHl3 MFC set to  0.000000
4/19/2011	12:10:06 AM	SiCl4 MFC set to  0.000000
4/19/2011	12:10:06 AM	Bypass solenoid MFC set to  0.000000
4/19/2011	12:10:06 AM	Tube furnace set to 350
4/19/2011	8:52:41 AM	Run aborted at 8:52 AM
4/19/2011	8:52:41 AM	Helium valve closed
4/19/2011	8:52:41 AM	H2 valve closed
4/19/2011	8:52:41 AM	BCl3 valve closed
4/19/2011	8:52:41 AM	PH3 valve closed
4/19/2011	8:52:41 AM	SiCl4 pre valve closed
4/19/2011	8:52:41 AM	SiCl4 post valve closed
4/19/2011	8:52:41 AM	Bypass valve closed
4/19/2011	8:52:41 AM	Main Vac valve closed
4/19/2011	8:52:41 AM	Bubbler valve closed
4/19/2011	8:52:41 AM	Helium MFC set to  0.000000
4/19/2011	8:52:41 AM	H2 MFC set to  0.000000
4/19/2011	8:52:41 AM	BCl3 MFC set to  0.000000
4/19/2011	8:52:41 AM	PHl3 MFC set to  0.000000
4/19/2011	8:52:41 AM	SiCl4 MFC set to  0.000000
4/19/2011	8:52:41 AM	Tube furnace set to 0
4/19/2011	9:05:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/19/2011	9:05:45 AM	Recipe started at 9:05 AM
4/19/2011	9:05:45 AM	Helium valve closed
4/19/2011	9:05:45 AM	H2 valve closed
4/19/2011	9:05:45 AM	BCl3 valve closed
4/19/2011	9:05:45 AM	PH3 valve closed
4/19/2011	9:05:45 AM	SiCl4 pre valve closed
4/19/2011	9:05:45 AM	SiCl4 post valve closed
4/19/2011	9:05:45 AM	Main Vac valve closed
4/19/2011	9:05:45 AM	Bubbler valve closed
4/19/2011	9:05:45 AM	Bypass valve opened
4/19/2011	9:05:45 AM	Helium MFC set to  0.000000
4/19/2011	9:05:45 AM	H2 MFC set to  0.000000
4/19/2011	9:05:45 AM	BCl3 MFC set to  0.000000
4/19/2011	9:05:45 AM	PHl3 MFC set to  0.000000
4/19/2011	9:05:45 AM	SiCl4 MFC set to  0.000000
4/19/2011	9:05:45 AM	Bypass solenoid MFC set to  0.000000
4/19/2011	9:05:45 AM	Tube furnace set to 0
4/19/2011	9:06:17 AM	Helium valve closed
4/19/2011	9:06:17 AM	H2 valve closed
4/19/2011	9:06:17 AM	BCl3 valve closed
4/19/2011	9:06:17 AM	PH3 valve closed
4/19/2011	9:06:17 AM	SiCl4 pre valve closed
4/19/2011	9:06:17 AM	SiCl4 post valve closed
4/19/2011	9:06:17 AM	Bubbler valve closed
4/19/2011	9:06:17 AM	Main Vac valve opened
4/19/2011	9:06:17 AM	Bypass valve opened
4/19/2011	9:06:17 AM	Helium MFC set to  0.000000
4/19/2011	9:06:17 AM	H2 MFC set to  0.000000
4/19/2011	9:06:17 AM	BCl3 MFC set to  0.000000
4/19/2011	9:06:17 AM	PHl3 MFC set to  0.000000
4/19/2011	9:06:17 AM	SiCl4 MFC set to  0.000000
4/19/2011	9:06:17 AM	Bypass solenoid MFC set to  0.000000
4/19/2011	9:06:18 AM	Tube furnace set to 0
4/19/2011	9:06:18 AM	Run finished at 9:06 AM
4/19/2011	9:06:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/19/2011	10:00:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/19/2011	10:01:09 AM	Recipe started at 10:01 AM
4/19/2011	10:01:09 AM	Helium valve closed
4/19/2011	10:01:09 AM	H2 valve closed
4/19/2011	10:01:09 AM	BCl3 valve closed
4/19/2011	10:01:09 AM	PH3 valve closed
4/19/2011	10:01:09 AM	SiCl4 pre valve closed
4/19/2011	10:01:09 AM	SiCl4 post valve closed
4/19/2011	10:01:09 AM	Main Vac valve closed
4/19/2011	10:01:09 AM	Bubbler valve closed
4/19/2011	10:01:09 AM	Bypass valve opened
4/19/2011	10:01:09 AM	Helium MFC set to  0.000000
4/19/2011	10:01:09 AM	H2 MFC set to  0.000000
4/19/2011	10:01:09 AM	BCl3 MFC set to  0.000000
4/19/2011	10:01:09 AM	PHl3 MFC set to  0.000000
4/19/2011	10:01:09 AM	SiCl4 MFC set to  0.000000
4/19/2011	10:01:09 AM	Bypass solenoid MFC set to  0.000000
4/19/2011	10:01:09 AM	Tube furnace set to 0
4/19/2011	10:01:10 AM	Helium valve closed
4/19/2011	10:01:10 AM	H2 valve closed
4/19/2011	10:01:10 AM	BCl3 valve closed
4/19/2011	10:01:10 AM	PH3 valve closed
4/19/2011	10:01:10 AM	SiCl4 pre valve closed
4/19/2011	10:01:10 AM	SiCl4 post valve closed
4/19/2011	10:01:10 AM	Bubbler valve closed
4/19/2011	10:01:10 AM	Main Vac valve opened
4/19/2011	10:01:10 AM	Bypass valve opened
4/19/2011	10:01:10 AM	Helium MFC set to  0.000000
4/19/2011	10:01:10 AM	H2 MFC set to  0.000000
4/19/2011	10:01:10 AM	BCl3 MFC set to  0.000000
4/19/2011	10:01:10 AM	PHl3 MFC set to  0.000000
4/19/2011	10:01:10 AM	SiCl4 MFC set to  0.000000
4/19/2011	10:01:10 AM	Bypass solenoid MFC set to  0.000000
4/19/2011	10:01:10 AM	Tube furnace set to 0
4/19/2011	10:02:10 AM	H2 valve closed
4/19/2011	10:02:10 AM	BCl3 valve closed
4/19/2011	10:02:10 AM	PH3 valve closed
4/19/2011	10:02:10 AM	SiCl4 pre valve closed
4/19/2011	10:02:10 AM	SiCl4 post valve closed
4/19/2011	10:02:10 AM	Bubbler valve closed
4/19/2011	10:02:10 AM	Helium valve opened
4/19/2011	10:02:10 AM	Main Vac valve opened
4/19/2011	10:02:10 AM	Bypass valve opened
4/19/2011	10:02:10 AM	Helium MFC set to  100.000000
4/19/2011	10:02:10 AM	H2 MFC set to  0.000000
4/19/2011	10:02:10 AM	BCl3 MFC set to  0.000000
4/19/2011	10:02:10 AM	PHl3 MFC set to  0.000000
4/19/2011	10:02:10 AM	SiCl4 MFC set to  0.000000
4/19/2011	10:02:10 AM	Bypass solenoid MFC set to  0.000000
4/19/2011	10:02:10 AM	Tube furnace set to 0
4/19/2011	10:03:10 AM	Helium valve closed
4/19/2011	10:03:10 AM	H2 valve closed
4/19/2011	10:03:10 AM	BCl3 valve closed
4/19/2011	10:03:10 AM	PH3 valve closed
4/19/2011	10:03:10 AM	SiCl4 pre valve closed
4/19/2011	10:03:10 AM	SiCl4 post valve closed
4/19/2011	10:03:10 AM	Bubbler valve closed
4/19/2011	10:03:10 AM	Main Vac valve opened
4/19/2011	10:03:10 AM	Bypass valve opened
4/19/2011	10:03:10 AM	Helium MFC set to  0.000000
4/19/2011	10:03:10 AM	H2 MFC set to  0.000000
4/19/2011	10:03:10 AM	BCl3 MFC set to  0.000000
4/19/2011	10:03:10 AM	PHl3 MFC set to  0.000000
4/19/2011	10:03:10 AM	SiCl4 MFC set to  0.000000
4/19/2011	10:03:10 AM	Bypass solenoid MFC set to  0.000000
4/19/2011	10:03:10 AM	Tube furnace set to 0
4/19/2011	10:04:10 AM	H2 valve closed
4/19/2011	10:04:10 AM	BCl3 valve closed
4/19/2011	10:04:10 AM	PH3 valve closed
4/19/2011	10:04:10 AM	SiCl4 pre valve closed
4/19/2011	10:04:10 AM	SiCl4 post valve closed
4/19/2011	10:04:10 AM	Bubbler valve closed
4/19/2011	10:04:10 AM	Helium valve opened
4/19/2011	10:04:10 AM	Main Vac valve opened
4/19/2011	10:04:10 AM	Bypass valve opened
4/19/2011	10:04:10 AM	Helium MFC set to  100.000000
4/19/2011	10:04:10 AM	H2 MFC set to  0.000000
4/19/2011	10:04:10 AM	BCl3 MFC set to  0.000000
4/19/2011	10:04:10 AM	PHl3 MFC set to  0.000000
4/19/2011	10:04:10 AM	SiCl4 MFC set to  0.000000
4/19/2011	10:04:10 AM	Bypass solenoid MFC set to  0.000000
4/19/2011	10:04:10 AM	Tube furnace set to 0
4/19/2011	10:05:10 AM	Helium valve closed
4/19/2011	10:05:10 AM	H2 valve closed
4/19/2011	10:05:10 AM	BCl3 valve closed
4/19/2011	10:05:10 AM	PH3 valve closed
4/19/2011	10:05:11 AM	SiCl4 pre valve closed
4/19/2011	10:05:11 AM	SiCl4 post valve closed
4/19/2011	10:05:11 AM	Bubbler valve closed
4/19/2011	10:05:11 AM	Main Vac valve opened
4/19/2011	10:05:11 AM	Bypass valve opened
4/19/2011	10:05:11 AM	Helium MFC set to  0.000000
4/19/2011	10:05:11 AM	H2 MFC set to  0.000000
4/19/2011	10:05:11 AM	BCl3 MFC set to  0.000000
4/19/2011	10:05:11 AM	PHl3 MFC set to  0.000000
4/19/2011	10:05:11 AM	SiCl4 MFC set to  0.000000
4/19/2011	10:05:11 AM	Bypass solenoid MFC set to  0.000000
4/19/2011	10:05:11 AM	Tube furnace set to 0
4/19/2011	10:06:11 AM	H2 valve closed
4/19/2011	10:06:11 AM	BCl3 valve closed
4/19/2011	10:06:11 AM	PH3 valve closed
4/19/2011	10:06:11 AM	SiCl4 pre valve closed
4/19/2011	10:06:11 AM	SiCl4 post valve closed
4/19/2011	10:06:11 AM	Bubbler valve closed
4/19/2011	10:06:11 AM	Helium valve opened
4/19/2011	10:06:11 AM	Main Vac valve opened
4/19/2011	10:06:11 AM	Bypass valve opened
4/19/2011	10:06:11 AM	Helium MFC set to  100.000000
4/19/2011	10:06:11 AM	H2 MFC set to  0.000000
4/19/2011	10:06:11 AM	BCl3 MFC set to  0.000000
4/19/2011	10:06:11 AM	PHl3 MFC set to  0.000000
4/19/2011	10:06:11 AM	SiCl4 MFC set to  0.000000
4/19/2011	10:06:11 AM	Bypass solenoid MFC set to  0.000000
4/19/2011	10:06:11 AM	Tube furnace set to 0
4/19/2011	10:07:11 AM	Helium valve closed
4/19/2011	10:07:11 AM	H2 valve closed
4/19/2011	10:07:11 AM	BCl3 valve closed
4/19/2011	10:07:11 AM	PH3 valve closed
4/19/2011	10:07:11 AM	SiCl4 pre valve closed
4/19/2011	10:07:11 AM	SiCl4 post valve closed
4/19/2011	10:07:11 AM	Bubbler valve closed
4/19/2011	10:07:11 AM	Main Vac valve opened
4/19/2011	10:07:11 AM	Bypass valve opened
4/19/2011	10:07:11 AM	Helium MFC set to  0.000000
4/19/2011	10:07:11 AM	H2 MFC set to  0.000000
4/19/2011	10:07:11 AM	BCl3 MFC set to  0.000000
4/19/2011	10:07:11 AM	PHl3 MFC set to  0.000000
4/19/2011	10:07:11 AM	SiCl4 MFC set to  0.000000
4/19/2011	10:07:11 AM	Bypass solenoid MFC set to  0.000000
4/19/2011	10:07:11 AM	Tube furnace set to 0
4/19/2011	10:08:11 AM	H2 valve closed
4/19/2011	10:08:11 AM	BCl3 valve closed
4/19/2011	10:08:11 AM	PH3 valve closed
4/19/2011	10:08:11 AM	SiCl4 pre valve closed
4/19/2011	10:08:11 AM	SiCl4 post valve closed
4/19/2011	10:08:11 AM	Bubbler valve closed
4/19/2011	10:08:11 AM	Helium valve opened
4/19/2011	10:08:11 AM	Main Vac valve opened
4/19/2011	10:08:11 AM	Bypass valve opened
4/19/2011	10:08:11 AM	Helium MFC set to  100.000000
4/19/2011	10:08:11 AM	H2 MFC set to  0.000000
4/19/2011	10:08:11 AM	BCl3 MFC set to  0.000000
4/19/2011	10:08:11 AM	PHl3 MFC set to  0.000000
4/19/2011	10:08:11 AM	SiCl4 MFC set to  0.000000
4/19/2011	10:08:11 AM	Bypass solenoid MFC set to  0.000000
4/19/2011	10:08:11 AM	Tube furnace set to 0
4/19/2011	10:09:11 AM	Helium valve closed
4/19/2011	10:09:11 AM	H2 valve closed
4/19/2011	10:09:11 AM	BCl3 valve closed
4/19/2011	10:09:11 AM	PH3 valve closed
4/19/2011	10:09:11 AM	SiCl4 pre valve closed
4/19/2011	10:09:11 AM	SiCl4 post valve closed
4/19/2011	10:09:11 AM	Bubbler valve closed
4/19/2011	10:09:11 AM	Main Vac valve opened
4/19/2011	10:09:11 AM	Bypass valve opened
4/19/2011	10:09:11 AM	Helium MFC set to  0.000000
4/19/2011	10:09:11 AM	H2 MFC set to  0.000000
4/19/2011	10:09:11 AM	BCl3 MFC set to  0.000000
4/19/2011	10:09:11 AM	PHl3 MFC set to  0.000000
4/19/2011	10:09:11 AM	SiCl4 MFC set to  0.000000
4/19/2011	10:09:11 AM	Bypass solenoid MFC set to  0.000000
4/19/2011	10:09:11 AM	Tube furnace set to 0
4/19/2011	10:10:11 AM	H2 valve closed
4/19/2011	10:10:11 AM	BCl3 valve closed
4/19/2011	10:10:11 AM	PH3 valve closed
4/19/2011	10:10:11 AM	SiCl4 pre valve closed
4/19/2011	10:10:11 AM	SiCl4 post valve closed
4/19/2011	10:10:11 AM	Bubbler valve closed
4/19/2011	10:10:11 AM	Helium valve opened
4/19/2011	10:10:12 AM	Main Vac valve opened
4/19/2011	10:10:12 AM	Bypass valve opened
4/19/2011	10:10:12 AM	Helium MFC set to  100.000000
4/19/2011	10:10:12 AM	H2 MFC set to  0.000000
4/19/2011	10:10:12 AM	BCl3 MFC set to  0.000000
4/19/2011	10:10:12 AM	PHl3 MFC set to  0.000000
4/19/2011	10:10:12 AM	SiCl4 MFC set to  0.000000
4/19/2011	10:10:12 AM	Bypass solenoid MFC set to  0.000000
4/19/2011	10:10:12 AM	Tube furnace set to 0
4/19/2011	10:11:12 AM	Helium valve closed
4/19/2011	10:11:12 AM	H2 valve closed
4/19/2011	10:11:12 AM	BCl3 valve closed
4/19/2011	10:11:12 AM	PH3 valve closed
4/19/2011	10:11:12 AM	SiCl4 pre valve closed
4/19/2011	10:11:12 AM	SiCl4 post valve closed
4/19/2011	10:11:12 AM	Bubbler valve closed
4/19/2011	10:11:12 AM	Main Vac valve opened
4/19/2011	10:11:12 AM	Bypass valve opened
4/19/2011	10:11:12 AM	Helium MFC set to  0.000000
4/19/2011	10:11:12 AM	H2 MFC set to  0.000000
4/19/2011	10:11:12 AM	BCl3 MFC set to  0.000000
4/19/2011	10:11:12 AM	PHl3 MFC set to  0.000000
4/19/2011	10:11:12 AM	SiCl4 MFC set to  0.000000
4/19/2011	10:11:12 AM	Bypass solenoid MFC set to  0.000000
4/19/2011	10:11:12 AM	Tube furnace set to 0
4/19/2011	10:12:12 AM	H2 valve closed
4/19/2011	10:12:12 AM	BCl3 valve closed
4/19/2011	10:12:12 AM	PH3 valve closed
4/19/2011	10:12:12 AM	SiCl4 pre valve closed
4/19/2011	10:12:12 AM	SiCl4 post valve closed
4/19/2011	10:12:12 AM	Bubbler valve closed
4/19/2011	10:12:12 AM	Helium valve opened
4/19/2011	10:12:12 AM	Main Vac valve opened
4/19/2011	10:12:12 AM	Bypass valve opened
4/19/2011	10:12:12 AM	Helium MFC set to  100.000000
4/19/2011	10:12:12 AM	H2 MFC set to  0.000000
4/19/2011	10:12:12 AM	BCl3 MFC set to  0.000000
4/19/2011	10:12:12 AM	PHl3 MFC set to  0.000000
4/19/2011	10:12:12 AM	SiCl4 MFC set to  0.000000
4/19/2011	10:12:12 AM	Bypass solenoid MFC set to  0.000000
4/19/2011	10:12:12 AM	Tube furnace set to 0
4/19/2011	10:13:12 AM	Helium valve closed
4/19/2011	10:13:12 AM	H2 valve closed
4/19/2011	10:13:12 AM	BCl3 valve closed
4/19/2011	10:13:12 AM	PH3 valve closed
4/19/2011	10:13:12 AM	SiCl4 pre valve closed
4/19/2011	10:13:12 AM	SiCl4 post valve closed
4/19/2011	10:13:12 AM	Bubbler valve closed
4/19/2011	10:13:12 AM	Main Vac valve opened
4/19/2011	10:13:12 AM	Bypass valve opened
4/19/2011	10:13:12 AM	Helium MFC set to  0.000000
4/19/2011	10:13:12 AM	H2 MFC set to  0.000000
4/19/2011	10:13:12 AM	BCl3 MFC set to  0.000000
4/19/2011	10:13:12 AM	PHl3 MFC set to  0.000000
4/19/2011	10:13:12 AM	SiCl4 MFC set to  0.000000
4/19/2011	10:13:12 AM	Bypass solenoid MFC set to  0.000000
4/19/2011	10:13:12 AM	Tube furnace set to 0
4/19/2011	10:14:12 AM	H2 valve closed
4/19/2011	10:14:12 AM	BCl3 valve closed
4/19/2011	10:14:12 AM	PH3 valve closed
4/19/2011	10:14:12 AM	SiCl4 pre valve closed
4/19/2011	10:14:12 AM	SiCl4 post valve closed
4/19/2011	10:14:12 AM	Bubbler valve closed
4/19/2011	10:14:12 AM	Helium valve opened
4/19/2011	10:14:12 AM	Main Vac valve opened
4/19/2011	10:14:12 AM	Bypass valve opened
4/19/2011	10:14:12 AM	Helium MFC set to  100.000000
4/19/2011	10:14:12 AM	H2 MFC set to  0.000000
4/19/2011	10:14:12 AM	BCl3 MFC set to  0.000000
4/19/2011	10:14:12 AM	PHl3 MFC set to  0.000000
4/19/2011	10:14:12 AM	SiCl4 MFC set to  0.000000
4/19/2011	10:14:12 AM	Bypass solenoid MFC set to  0.000000
4/19/2011	10:14:12 AM	Tube furnace set to 0
4/19/2011	10:15:12 AM	Helium valve closed
4/19/2011	10:15:12 AM	H2 valve closed
4/19/2011	10:15:12 AM	BCl3 valve closed
4/19/2011	10:15:12 AM	PH3 valve closed
4/19/2011	10:15:12 AM	SiCl4 pre valve closed
4/19/2011	10:15:12 AM	SiCl4 post valve closed
4/19/2011	10:15:13 AM	Bubbler valve closed
4/19/2011	10:15:13 AM	Main Vac valve opened
4/19/2011	10:15:13 AM	Bypass valve opened
4/19/2011	10:15:13 AM	Helium MFC set to  0.000000
4/19/2011	10:15:13 AM	H2 MFC set to  0.000000
4/19/2011	10:15:13 AM	BCl3 MFC set to  0.000000
4/19/2011	10:15:13 AM	PHl3 MFC set to  0.000000
4/19/2011	10:15:13 AM	SiCl4 MFC set to  0.000000
4/19/2011	10:15:13 AM	Bypass solenoid MFC set to  0.000000
4/19/2011	10:15:13 AM	Tube furnace set to 0
4/19/2011	10:16:13 AM	H2 valve closed
4/19/2011	10:16:13 AM	BCl3 valve closed
4/19/2011	10:16:13 AM	PH3 valve closed
4/19/2011	10:16:13 AM	SiCl4 pre valve closed
4/19/2011	10:16:13 AM	SiCl4 post valve closed
4/19/2011	10:16:13 AM	Bubbler valve closed
4/19/2011	10:16:13 AM	Helium valve opened
4/19/2011	10:16:13 AM	Main Vac valve opened
4/19/2011	10:16:13 AM	Bypass valve opened
4/19/2011	10:16:13 AM	Helium MFC set to  100.000000
4/19/2011	10:16:13 AM	H2 MFC set to  0.000000
4/19/2011	10:16:13 AM	BCl3 MFC set to  0.000000
4/19/2011	10:16:13 AM	PHl3 MFC set to  0.000000
4/19/2011	10:16:13 AM	SiCl4 MFC set to  0.000000
4/19/2011	10:16:13 AM	Bypass solenoid MFC set to  0.000000
4/19/2011	10:16:13 AM	Tube furnace set to 0
4/19/2011	10:17:13 AM	Helium valve closed
4/19/2011	10:17:13 AM	H2 valve closed
4/19/2011	10:17:13 AM	BCl3 valve closed
4/19/2011	10:17:13 AM	PH3 valve closed
4/19/2011	10:17:13 AM	SiCl4 pre valve closed
4/19/2011	10:17:13 AM	SiCl4 post valve closed
4/19/2011	10:17:13 AM	Bubbler valve closed
4/19/2011	10:17:13 AM	Main Vac valve opened
4/19/2011	10:17:13 AM	Bypass valve opened
4/19/2011	10:17:13 AM	Helium MFC set to  0.000000
4/19/2011	10:17:13 AM	H2 MFC set to  0.000000
4/19/2011	10:17:13 AM	BCl3 MFC set to  0.000000
4/19/2011	10:17:13 AM	PHl3 MFC set to  0.000000
4/19/2011	10:17:13 AM	SiCl4 MFC set to  0.000000
4/19/2011	10:17:13 AM	Bypass solenoid MFC set to  0.000000
4/19/2011	10:17:13 AM	Tube furnace set to 0
4/19/2011	10:18:13 AM	H2 valve closed
4/19/2011	10:18:13 AM	BCl3 valve closed
4/19/2011	10:18:13 AM	PH3 valve closed
4/19/2011	10:18:13 AM	SiCl4 pre valve closed
4/19/2011	10:18:13 AM	SiCl4 post valve closed
4/19/2011	10:18:13 AM	Bubbler valve closed
4/19/2011	10:18:13 AM	Helium valve opened
4/19/2011	10:18:13 AM	Main Vac valve opened
4/19/2011	10:18:13 AM	Bypass valve opened
4/19/2011	10:18:13 AM	Helium MFC set to  100.000000
4/19/2011	10:18:13 AM	H2 MFC set to  0.000000
4/19/2011	10:18:13 AM	BCl3 MFC set to  0.000000
4/19/2011	10:18:13 AM	PHl3 MFC set to  0.000000
4/19/2011	10:18:13 AM	SiCl4 MFC set to  0.000000
4/19/2011	10:18:13 AM	Bypass solenoid MFC set to  0.000000
4/19/2011	10:18:13 AM	Tube furnace set to 0
4/19/2011	10:19:13 AM	Helium valve closed
4/19/2011	10:19:13 AM	H2 valve closed
4/19/2011	10:19:13 AM	BCl3 valve closed
4/19/2011	10:19:13 AM	PH3 valve closed
4/19/2011	10:19:13 AM	SiCl4 pre valve closed
4/19/2011	10:19:13 AM	SiCl4 post valve closed
4/19/2011	10:19:13 AM	Bubbler valve closed
4/19/2011	10:19:13 AM	Main Vac valve opened
4/19/2011	10:19:13 AM	Bypass valve opened
4/19/2011	10:19:13 AM	Helium MFC set to  0.000000
4/19/2011	10:19:13 AM	H2 MFC set to  0.000000
4/19/2011	10:19:13 AM	BCl3 MFC set to  0.000000
4/19/2011	10:19:13 AM	PHl3 MFC set to  0.000000
4/19/2011	10:19:13 AM	SiCl4 MFC set to  0.000000
4/19/2011	10:19:13 AM	Bypass solenoid MFC set to  0.000000
4/19/2011	10:19:13 AM	Tube furnace set to 0
4/19/2011	10:20:13 AM	H2 valve closed
4/19/2011	10:20:13 AM	BCl3 valve closed
4/19/2011	10:20:13 AM	PH3 valve closed
4/19/2011	10:20:13 AM	SiCl4 pre valve closed
4/19/2011	10:20:13 AM	SiCl4 post valve closed
4/19/2011	10:20:13 AM	Bubbler valve closed
4/19/2011	10:20:13 AM	Helium valve opened
4/19/2011	10:20:13 AM	Main Vac valve opened
4/19/2011	10:20:13 AM	Bypass valve opened
4/19/2011	10:20:13 AM	Helium MFC set to  100.000000
4/19/2011	10:20:13 AM	H2 MFC set to  0.000000
4/19/2011	10:20:13 AM	BCl3 MFC set to  0.000000
4/19/2011	10:20:13 AM	PHl3 MFC set to  0.000000
4/19/2011	10:20:13 AM	SiCl4 MFC set to  0.000000
4/19/2011	10:20:13 AM	Bypass solenoid MFC set to  0.000000
4/19/2011	10:20:14 AM	Tube furnace set to 0
4/19/2011	10:21:14 AM	Helium valve closed
4/19/2011	10:21:14 AM	H2 valve closed
4/19/2011	10:21:14 AM	BCl3 valve closed
4/19/2011	10:21:14 AM	PH3 valve closed
4/19/2011	10:21:14 AM	SiCl4 pre valve closed
4/19/2011	10:21:14 AM	SiCl4 post valve closed
4/19/2011	10:21:14 AM	Bubbler valve closed
4/19/2011	10:21:14 AM	Main Vac valve opened
4/19/2011	10:21:14 AM	Bypass valve opened
4/19/2011	10:21:14 AM	Helium MFC set to  0.000000
4/19/2011	10:21:14 AM	H2 MFC set to  0.000000
4/19/2011	10:21:14 AM	BCl3 MFC set to  0.000000
4/19/2011	10:21:14 AM	PHl3 MFC set to  0.000000
4/19/2011	10:21:14 AM	SiCl4 MFC set to  0.000000
4/19/2011	10:21:14 AM	Bypass solenoid MFC set to  0.000000
4/19/2011	10:21:14 AM	Tube furnace set to 0
4/19/2011	10:21:15 AM	Run finished at 10:21 AM
4/19/2011	10:21:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/19/2011	10:28:09 AM	Recipe started at 10:28 AM
4/19/2011	10:28:09 AM	BCl3 valve closed
4/19/2011	10:28:09 AM	PH3 valve closed
4/19/2011	10:28:09 AM	SiCl4 pre valve closed
4/19/2011	10:28:09 AM	SiCl4 post valve closed
4/19/2011	10:28:09 AM	Main Vac valve closed
4/19/2011	10:28:09 AM	Bypass valve closed
4/19/2011	10:28:09 AM	Bubbler valve closed
4/19/2011	10:28:09 AM	Helium valve opened
4/19/2011	10:28:09 AM	H2 valve opened
4/19/2011	10:28:09 AM	Helium MFC set to  190.000000
4/19/2011	10:28:09 AM	H2 MFC set to  10.000000
4/19/2011	10:28:09 AM	BCl3 MFC set to  0.000000
4/19/2011	10:28:09 AM	PHl3 MFC set to  0.000000
4/19/2011	10:28:09 AM	SiCl4 MFC set to  0.000000
4/19/2011	10:28:09 AM	Bypass solenoid MFC set to  0.000000
4/19/2011	10:28:09 AM	Tube furnace set to 0
4/19/2011	10:31:31 AM	BCl3 valve closed
4/19/2011	10:31:31 AM	PH3 valve closed
4/19/2011	10:31:31 AM	SiCl4 pre valve closed
4/19/2011	10:31:31 AM	SiCl4 post valve closed
4/19/2011	10:31:31 AM	Main Vac valve closed
4/19/2011	10:31:31 AM	Bypass valve closed
4/19/2011	10:31:31 AM	Helium valve opened
4/19/2011	10:31:31 AM	H2 valve opened
4/19/2011	10:31:31 AM	Bubbler valve opened
4/19/2011	10:31:31 AM	Helium MFC set to  47.500000
4/19/2011	10:31:31 AM	H2 MFC set to  2.500000
4/19/2011	10:31:31 AM	BCl3 MFC set to  0.000000
4/19/2011	10:31:31 AM	PHl3 MFC set to  0.000000
4/19/2011	10:31:31 AM	SiCl4 MFC set to  0.000000
4/19/2011	10:31:31 AM	Bypass solenoid MFC set to  0.000000
4/19/2011	10:31:31 AM	Tube furnace set to 450
4/19/2011	10:53:57 AM	Run aborted at 10:53 AM
4/19/2011	10:53:57 AM	Helium valve closed
4/19/2011	10:53:57 AM	H2 valve closed
4/19/2011	10:53:57 AM	BCl3 valve closed
4/19/2011	10:53:57 AM	PH3 valve closed
4/19/2011	10:53:57 AM	SiCl4 pre valve closed
4/19/2011	10:53:57 AM	SiCl4 post valve closed
4/19/2011	10:53:57 AM	Bypass valve closed
4/19/2011	10:53:57 AM	Main Vac valve closed
4/19/2011	10:53:57 AM	Bubbler valve closed
4/19/2011	10:53:57 AM	Helium MFC set to  0.000000
4/19/2011	10:53:57 AM	H2 MFC set to  0.000000
4/19/2011	10:53:57 AM	BCl3 MFC set to  0.000000
4/19/2011	10:53:57 AM	PHl3 MFC set to  0.000000
4/19/2011	10:53:57 AM	SiCl4 MFC set to  0.000000
4/19/2011	10:53:57 AM	Tube furnace set to 0
4/19/2011	10:54:06 AM	Recipe started at 10:54 AM
4/19/2011	10:54:06 AM	BCl3 valve closed
4/19/2011	10:54:06 AM	PH3 valve closed
4/19/2011	10:54:06 AM	SiCl4 pre valve closed
4/19/2011	10:54:06 AM	SiCl4 post valve closed
4/19/2011	10:54:06 AM	Main Vac valve closed
4/19/2011	10:54:06 AM	Bypass valve closed
4/19/2011	10:54:06 AM	Bubbler valve closed
4/19/2011	10:54:06 AM	Helium valve opened
4/19/2011	10:54:06 AM	H2 valve opened
4/19/2011	10:54:06 AM	Helium MFC set to  190.000000
4/19/2011	10:54:06 AM	H2 MFC set to  10.000000
4/19/2011	10:54:06 AM	BCl3 MFC set to  0.000000
4/19/2011	10:54:06 AM	PHl3 MFC set to  0.000000
4/19/2011	10:54:06 AM	SiCl4 MFC set to  0.000000
4/19/2011	10:54:06 AM	Bypass solenoid MFC set to  0.000000
4/19/2011	10:54:07 AM	Tube furnace set to 0
4/19/2011	10:54:14 AM	BCl3 valve closed
4/19/2011	10:54:14 AM	PH3 valve closed
4/19/2011	10:54:14 AM	SiCl4 pre valve closed
4/19/2011	10:54:14 AM	SiCl4 post valve closed
4/19/2011	10:54:14 AM	Main Vac valve closed
4/19/2011	10:54:14 AM	Bypass valve closed
4/19/2011	10:54:14 AM	Helium valve opened
4/19/2011	10:54:14 AM	H2 valve opened
4/19/2011	10:54:14 AM	Bubbler valve opened
4/19/2011	10:54:14 AM	Helium MFC set to  47.500000
4/19/2011	10:54:14 AM	H2 MFC set to  2.500000
4/19/2011	10:54:14 AM	BCl3 MFC set to  0.000000
4/19/2011	10:54:14 AM	PHl3 MFC set to  0.000000
4/19/2011	10:54:14 AM	SiCl4 MFC set to  0.000000
4/19/2011	10:54:14 AM	Bypass solenoid MFC set to  0.000000
4/19/2011	10:54:14 AM	Tube furnace set to 450
4/19/2011	11:14:14 AM	Helium valve closed
4/19/2011	11:14:14 AM	H2 valve closed
4/19/2011	11:14:14 AM	BCl3 valve closed
4/19/2011	11:14:14 AM	PH3 valve closed
4/19/2011	11:14:14 AM	SiCl4 pre valve closed
4/19/2011	11:14:14 AM	SiCl4 post valve closed
4/19/2011	11:14:14 AM	Main Vac valve closed
4/19/2011	11:14:14 AM	Bypass valve closed
4/19/2011	11:14:14 AM	Bubbler valve closed
4/19/2011	11:14:14 AM	Helium MFC set to  0.000000
4/19/2011	11:14:14 AM	H2 MFC set to  0.000000
4/19/2011	11:14:14 AM	BCl3 MFC set to  0.000000
4/19/2011	11:14:14 AM	PHl3 MFC set to  0.000000
4/19/2011	11:14:14 AM	SiCl4 MFC set to  0.000000
4/19/2011	11:14:14 AM	Bypass solenoid MFC set to  0.000000
4/19/2011	11:14:14 AM	Tube furnace set to 0
4/19/2011	11:14:15 AM	Run finished at 11:14 AM
4/19/2011	11:20:54 AM	H2 MFC set to  100.000000
4/19/2011	11:20:56 AM	H2 valve opened
4/19/2011	11:21:19 AM	H2 valve closed
4/19/2011	11:21:22 AM	H2 MFC set to  0.000000
4/19/2011	12:33:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/19/2011	12:33:57 PM	Recipe started at 12:33 PM
4/19/2011	12:33:57 PM	Helium valve closed
4/19/2011	12:33:57 PM	H2 valve closed
4/19/2011	12:33:57 PM	BCl3 valve closed
4/19/2011	12:33:57 PM	PH3 valve closed
4/19/2011	12:33:57 PM	SiCl4 pre valve closed
4/19/2011	12:33:57 PM	SiCl4 post valve closed
4/19/2011	12:33:57 PM	Main Vac valve closed
4/19/2011	12:33:57 PM	Bubbler valve closed
4/19/2011	12:33:57 PM	Bypass valve opened
4/19/2011	12:33:57 PM	Helium MFC set to  0.000000
4/19/2011	12:33:57 PM	H2 MFC set to  0.000000
4/19/2011	12:33:57 PM	BCl3 MFC set to  0.000000
4/19/2011	12:33:57 PM	PHl3 MFC set to  0.000000
4/19/2011	12:33:57 PM	SiCl4 MFC set to  0.000000
4/19/2011	12:33:57 PM	Bypass solenoid MFC set to  0.000000
4/19/2011	12:33:57 PM	Tube furnace set to 0
4/19/2011	12:34:29 PM	Helium valve closed
4/19/2011	12:34:29 PM	H2 valve closed
4/19/2011	12:34:29 PM	BCl3 valve closed
4/19/2011	12:34:29 PM	PH3 valve closed
4/19/2011	12:34:29 PM	SiCl4 pre valve closed
4/19/2011	12:34:29 PM	SiCl4 post valve closed
4/19/2011	12:34:29 PM	Bubbler valve closed
4/19/2011	12:34:29 PM	Main Vac valve opened
4/19/2011	12:34:29 PM	Bypass valve opened
4/19/2011	12:34:29 PM	Helium MFC set to  0.000000
4/19/2011	12:34:29 PM	H2 MFC set to  0.000000
4/19/2011	12:34:29 PM	BCl3 MFC set to  0.000000
4/19/2011	12:34:29 PM	PHl3 MFC set to  0.000000
4/19/2011	12:34:29 PM	SiCl4 MFC set to  0.000000
4/19/2011	12:34:29 PM	Bypass solenoid MFC set to  0.000000
4/19/2011	12:34:29 PM	Tube furnace set to 0
4/19/2011	12:34:29 PM	Run finished at 12:34 PM
4/19/2011	12:34:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/19/2011	12:43:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/19/2011	12:43:16 PM	Recipe started at 12:43 PM
4/19/2011	12:43:16 PM	H2 valve closed
4/19/2011	12:43:16 PM	BCl3 valve closed
4/19/2011	12:43:16 PM	PH3 valve closed
4/19/2011	12:43:16 PM	SiCl4 pre valve closed
4/19/2011	12:43:16 PM	SiCl4 post valve closed
4/19/2011	12:43:16 PM	Main Vac valve closed
4/19/2011	12:43:16 PM	Bypass valve closed
4/19/2011	12:43:16 PM	Bubbler valve closed
4/19/2011	12:43:16 PM	Helium valve opened
4/19/2011	12:43:16 PM	Helium MFC set to  500.000000
4/19/2011	12:43:16 PM	H2 MFC set to  0.000000
4/19/2011	12:43:16 PM	BCl3 MFC set to  0.000000
4/19/2011	12:43:16 PM	PHl3 MFC set to  0.000000
4/19/2011	12:43:16 PM	SiCl4 MFC set to  0.000000
4/19/2011	12:43:16 PM	Bypass solenoid MFC set to  0.000000
4/19/2011	12:43:16 PM	Tube furnace set to 0
4/19/2011	12:44:36 PM	Helium valve closed
4/19/2011	12:44:36 PM	H2 valve closed
4/19/2011	12:44:36 PM	BCl3 valve closed
4/19/2011	12:44:36 PM	PH3 valve closed
4/19/2011	12:44:36 PM	SiCl4 pre valve closed
4/19/2011	12:44:36 PM	SiCl4 post valve closed
4/19/2011	12:44:36 PM	Main Vac valve closed
4/19/2011	12:44:36 PM	Bypass valve closed
4/19/2011	12:44:36 PM	Bubbler valve closed
4/19/2011	12:44:36 PM	Helium MFC set to  0.000000
4/19/2011	12:44:36 PM	H2 MFC set to  0.000000
4/19/2011	12:44:36 PM	BCl3 MFC set to  0.000000
4/19/2011	12:44:36 PM	PHl3 MFC set to  0.000000
4/19/2011	12:44:36 PM	SiCl4 MFC set to  0.000000
4/19/2011	12:44:36 PM	Bypass solenoid MFC set to  0.000000
4/19/2011	12:44:36 PM	Tube furnace set to 0
4/19/2011	12:44:37 PM	Run finished at 12:44 PM
4/19/2011	12:44:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/19/2011	12:51:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/19/2011	12:51:33 PM	Recipe started at 12:51 PM
4/19/2011	12:51:33 PM	Helium valve closed
4/19/2011	12:51:33 PM	H2 valve closed
4/19/2011	12:51:33 PM	BCl3 valve closed
4/19/2011	12:51:33 PM	PH3 valve closed
4/19/2011	12:51:33 PM	SiCl4 pre valve closed
4/19/2011	12:51:33 PM	SiCl4 post valve closed
4/19/2011	12:51:33 PM	Main Vac valve closed
4/19/2011	12:51:33 PM	Bubbler valve closed
4/19/2011	12:51:33 PM	Bypass valve opened
4/19/2011	12:51:33 PM	Helium MFC set to  0.000000
4/19/2011	12:51:33 PM	H2 MFC set to  0.000000
4/19/2011	12:51:33 PM	BCl3 MFC set to  0.000000
4/19/2011	12:51:33 PM	PHl3 MFC set to  0.000000
4/19/2011	12:51:33 PM	SiCl4 MFC set to  0.000000
4/19/2011	12:51:33 PM	Bypass solenoid MFC set to  0.000000
4/19/2011	12:51:33 PM	Tube furnace set to 0
4/19/2011	12:52:05 PM	Helium valve closed
4/19/2011	12:52:05 PM	H2 valve closed
4/19/2011	12:52:05 PM	BCl3 valve closed
4/19/2011	12:52:05 PM	PH3 valve closed
4/19/2011	12:52:05 PM	SiCl4 pre valve closed
4/19/2011	12:52:05 PM	SiCl4 post valve closed
4/19/2011	12:52:05 PM	Bubbler valve closed
4/19/2011	12:52:05 PM	Main Vac valve opened
4/19/2011	12:52:05 PM	Bypass valve opened
4/19/2011	12:52:05 PM	Helium MFC set to  0.000000
4/19/2011	12:52:05 PM	H2 MFC set to  0.000000
4/19/2011	12:52:05 PM	BCl3 MFC set to  0.000000
4/19/2011	12:52:05 PM	PHl3 MFC set to  0.000000
4/19/2011	12:52:05 PM	SiCl4 MFC set to  0.000000
4/19/2011	12:52:05 PM	Bypass solenoid MFC set to  0.000000
4/19/2011	12:52:05 PM	Tube furnace set to 0
4/19/2011	12:52:05 PM	Run finished at 12:52 PM
4/19/2011	12:52:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/19/2011	12:52:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/19/2011	12:52:59 PM	Recipe started at 12:52 PM
4/19/2011	12:52:59 PM	Helium valve closed
4/19/2011	12:52:59 PM	H2 valve closed
4/19/2011	12:52:59 PM	BCl3 valve closed
4/19/2011	12:52:59 PM	PH3 valve closed
4/19/2011	12:52:59 PM	SiCl4 pre valve closed
4/19/2011	12:52:59 PM	SiCl4 post valve closed
4/19/2011	12:52:59 PM	Main Vac valve closed
4/19/2011	12:52:59 PM	Bubbler valve closed
4/19/2011	12:52:59 PM	Bypass valve opened
4/19/2011	12:52:59 PM	Helium MFC set to  0.000000
4/19/2011	12:52:59 PM	H2 MFC set to  0.000000
4/19/2011	12:52:59 PM	BCl3 MFC set to  0.000000
4/19/2011	12:52:59 PM	PHl3 MFC set to  0.000000
4/19/2011	12:52:59 PM	SiCl4 MFC set to  0.000000
4/19/2011	12:52:59 PM	Bypass solenoid MFC set to  0.000000
4/19/2011	12:52:59 PM	Tube furnace set to 0
4/19/2011	12:52:59 PM	Helium valve closed
4/19/2011	12:52:59 PM	H2 valve closed
4/19/2011	12:52:59 PM	BCl3 valve closed
4/19/2011	12:52:59 PM	PH3 valve closed
4/19/2011	12:52:59 PM	SiCl4 pre valve closed
4/19/2011	12:52:59 PM	SiCl4 post valve closed
4/19/2011	12:52:59 PM	Bubbler valve closed
4/19/2011	12:53:00 PM	Main Vac valve opened
4/19/2011	12:53:00 PM	Bypass valve opened
4/19/2011	12:53:00 PM	Helium MFC set to  0.000000
4/19/2011	12:53:00 PM	H2 MFC set to  0.000000
4/19/2011	12:53:00 PM	BCl3 MFC set to  0.000000
4/19/2011	12:53:00 PM	PHl3 MFC set to  0.000000
4/19/2011	12:53:00 PM	SiCl4 MFC set to  0.000000
4/19/2011	12:53:00 PM	Bypass solenoid MFC set to  0.000000
4/19/2011	12:53:00 PM	Tube furnace set to 0
4/19/2011	12:54:00 PM	H2 valve closed
4/19/2011	12:54:00 PM	BCl3 valve closed
4/19/2011	12:54:00 PM	PH3 valve closed
4/19/2011	12:54:00 PM	SiCl4 pre valve closed
4/19/2011	12:54:00 PM	SiCl4 post valve closed
4/19/2011	12:54:00 PM	Bubbler valve closed
4/19/2011	12:54:00 PM	Helium valve opened
4/19/2011	12:54:00 PM	Main Vac valve opened
4/19/2011	12:54:00 PM	Bypass valve opened
4/19/2011	12:54:00 PM	Helium MFC set to  100.000000
4/19/2011	12:54:00 PM	H2 MFC set to  0.000000
4/19/2011	12:54:00 PM	BCl3 MFC set to  0.000000
4/19/2011	12:54:00 PM	PHl3 MFC set to  0.000000
4/19/2011	12:54:00 PM	SiCl4 MFC set to  0.000000
4/19/2011	12:54:00 PM	Bypass solenoid MFC set to  0.000000
4/19/2011	12:54:00 PM	Tube furnace set to 0
4/19/2011	12:55:00 PM	Helium valve closed
4/19/2011	12:55:00 PM	H2 valve closed
4/19/2011	12:55:00 PM	BCl3 valve closed
4/19/2011	12:55:00 PM	PH3 valve closed
4/19/2011	12:55:00 PM	SiCl4 pre valve closed
4/19/2011	12:55:00 PM	SiCl4 post valve closed
4/19/2011	12:55:00 PM	Bubbler valve closed
4/19/2011	12:55:00 PM	Main Vac valve opened
4/19/2011	12:55:00 PM	Bypass valve opened
4/19/2011	12:55:00 PM	Helium MFC set to  0.000000
4/19/2011	12:55:00 PM	H2 MFC set to  0.000000
4/19/2011	12:55:00 PM	BCl3 MFC set to  0.000000
4/19/2011	12:55:00 PM	PHl3 MFC set to  0.000000
4/19/2011	12:55:00 PM	SiCl4 MFC set to  0.000000
4/19/2011	12:55:00 PM	Bypass solenoid MFC set to  0.000000
4/19/2011	12:55:00 PM	Tube furnace set to 0
4/19/2011	12:56:00 PM	H2 valve closed
4/19/2011	12:56:00 PM	BCl3 valve closed
4/19/2011	12:56:00 PM	PH3 valve closed
4/19/2011	12:56:00 PM	SiCl4 pre valve closed
4/19/2011	12:56:00 PM	SiCl4 post valve closed
4/19/2011	12:56:00 PM	Bubbler valve closed
4/19/2011	12:56:00 PM	Helium valve opened
4/19/2011	12:56:00 PM	Main Vac valve opened
4/19/2011	12:56:00 PM	Bypass valve opened
4/19/2011	12:56:00 PM	Helium MFC set to  100.000000
4/19/2011	12:56:00 PM	H2 MFC set to  0.000000
4/19/2011	12:56:00 PM	BCl3 MFC set to  0.000000
4/19/2011	12:56:00 PM	PHl3 MFC set to  0.000000
4/19/2011	12:56:00 PM	SiCl4 MFC set to  0.000000
4/19/2011	12:56:00 PM	Bypass solenoid MFC set to  0.000000
4/19/2011	12:56:00 PM	Tube furnace set to 0
4/19/2011	12:57:00 PM	Helium valve closed
4/19/2011	12:57:00 PM	H2 valve closed
4/19/2011	12:57:00 PM	BCl3 valve closed
4/19/2011	12:57:00 PM	PH3 valve closed
4/19/2011	12:57:00 PM	SiCl4 pre valve closed
4/19/2011	12:57:00 PM	SiCl4 post valve closed
4/19/2011	12:57:00 PM	Bubbler valve closed
4/19/2011	12:57:00 PM	Main Vac valve opened
4/19/2011	12:57:00 PM	Bypass valve opened
4/19/2011	12:57:00 PM	Helium MFC set to  0.000000
4/19/2011	12:57:00 PM	H2 MFC set to  0.000000
4/19/2011	12:57:00 PM	BCl3 MFC set to  0.000000
4/19/2011	12:57:00 PM	PHl3 MFC set to  0.000000
4/19/2011	12:57:00 PM	SiCl4 MFC set to  0.000000
4/19/2011	12:57:00 PM	Bypass solenoid MFC set to  0.000000
4/19/2011	12:57:00 PM	Tube furnace set to 0
4/19/2011	12:58:00 PM	H2 valve closed
4/19/2011	12:58:00 PM	BCl3 valve closed
4/19/2011	12:58:00 PM	PH3 valve closed
4/19/2011	12:58:00 PM	SiCl4 pre valve closed
4/19/2011	12:58:00 PM	SiCl4 post valve closed
4/19/2011	12:58:00 PM	Bubbler valve closed
4/19/2011	12:58:00 PM	Helium valve opened
4/19/2011	12:58:00 PM	Main Vac valve opened
4/19/2011	12:58:00 PM	Bypass valve opened
4/19/2011	12:58:00 PM	Helium MFC set to  100.000000
4/19/2011	12:58:00 PM	H2 MFC set to  0.000000
4/19/2011	12:58:00 PM	BCl3 MFC set to  0.000000
4/19/2011	12:58:00 PM	PHl3 MFC set to  0.000000
4/19/2011	12:58:00 PM	SiCl4 MFC set to  0.000000
4/19/2011	12:58:00 PM	Bypass solenoid MFC set to  0.000000
4/19/2011	12:58:01 PM	Tube furnace set to 0
4/19/2011	12:59:01 PM	Helium valve closed
4/19/2011	12:59:01 PM	H2 valve closed
4/19/2011	12:59:01 PM	BCl3 valve closed
4/19/2011	12:59:01 PM	PH3 valve closed
4/19/2011	12:59:01 PM	SiCl4 pre valve closed
4/19/2011	12:59:01 PM	SiCl4 post valve closed
4/19/2011	12:59:01 PM	Bubbler valve closed
4/19/2011	12:59:01 PM	Main Vac valve opened
4/19/2011	12:59:01 PM	Bypass valve opened
4/19/2011	12:59:01 PM	Helium MFC set to  0.000000
4/19/2011	12:59:01 PM	H2 MFC set to  0.000000
4/19/2011	12:59:01 PM	BCl3 MFC set to  0.000000
4/19/2011	12:59:01 PM	PHl3 MFC set to  0.000000
4/19/2011	12:59:01 PM	SiCl4 MFC set to  0.000000
4/19/2011	12:59:01 PM	Bypass solenoid MFC set to  0.000000
4/19/2011	12:59:01 PM	Tube furnace set to 0
4/19/2011	1:00:01 PM	H2 valve closed
4/19/2011	1:00:01 PM	BCl3 valve closed
4/19/2011	1:00:01 PM	PH3 valve closed
4/19/2011	1:00:01 PM	SiCl4 pre valve closed
4/19/2011	1:00:01 PM	SiCl4 post valve closed
4/19/2011	1:00:01 PM	Bubbler valve closed
4/19/2011	1:00:01 PM	Helium valve opened
4/19/2011	1:00:01 PM	Main Vac valve opened
4/19/2011	1:00:01 PM	Bypass valve opened
4/19/2011	1:00:01 PM	Helium MFC set to  100.000000
4/19/2011	1:00:01 PM	H2 MFC set to  0.000000
4/19/2011	1:00:01 PM	BCl3 MFC set to  0.000000
4/19/2011	1:00:01 PM	PHl3 MFC set to  0.000000
4/19/2011	1:00:01 PM	SiCl4 MFC set to  0.000000
4/19/2011	1:00:01 PM	Bypass solenoid MFC set to  0.000000
4/19/2011	1:00:01 PM	Tube furnace set to 0
4/19/2011	1:01:01 PM	Helium valve closed
4/19/2011	1:01:01 PM	H2 valve closed
4/19/2011	1:01:01 PM	BCl3 valve closed
4/19/2011	1:01:01 PM	PH3 valve closed
4/19/2011	1:01:01 PM	SiCl4 pre valve closed
4/19/2011	1:01:01 PM	SiCl4 post valve closed
4/19/2011	1:01:01 PM	Bubbler valve closed
4/19/2011	1:01:01 PM	Main Vac valve opened
4/19/2011	1:01:01 PM	Bypass valve opened
4/19/2011	1:01:01 PM	Helium MFC set to  0.000000
4/19/2011	1:01:01 PM	H2 MFC set to  0.000000
4/19/2011	1:01:01 PM	BCl3 MFC set to  0.000000
4/19/2011	1:01:01 PM	PHl3 MFC set to  0.000000
4/19/2011	1:01:01 PM	SiCl4 MFC set to  0.000000
4/19/2011	1:01:01 PM	Bypass solenoid MFC set to  0.000000
4/19/2011	1:01:01 PM	Tube furnace set to 0
4/19/2011	1:02:01 PM	H2 valve closed
4/19/2011	1:02:01 PM	BCl3 valve closed
4/19/2011	1:02:01 PM	PH3 valve closed
4/19/2011	1:02:01 PM	SiCl4 pre valve closed
4/19/2011	1:02:01 PM	SiCl4 post valve closed
4/19/2011	1:02:01 PM	Bubbler valve closed
4/19/2011	1:02:01 PM	Helium valve opened
4/19/2011	1:02:01 PM	Main Vac valve opened
4/19/2011	1:02:01 PM	Bypass valve opened
4/19/2011	1:02:01 PM	Helium MFC set to  100.000000
4/19/2011	1:02:01 PM	H2 MFC set to  0.000000
4/19/2011	1:02:01 PM	BCl3 MFC set to  0.000000
4/19/2011	1:02:01 PM	PHl3 MFC set to  0.000000
4/19/2011	1:02:01 PM	SiCl4 MFC set to  0.000000
4/19/2011	1:02:01 PM	Bypass solenoid MFC set to  0.000000
4/19/2011	1:02:01 PM	Tube furnace set to 0
4/19/2011	1:03:01 PM	Helium valve closed
4/19/2011	1:03:01 PM	H2 valve closed
4/19/2011	1:03:01 PM	BCl3 valve closed
4/19/2011	1:03:01 PM	PH3 valve closed
4/19/2011	1:03:01 PM	SiCl4 pre valve closed
4/19/2011	1:03:01 PM	SiCl4 post valve closed
4/19/2011	1:03:01 PM	Bubbler valve closed
4/19/2011	1:03:01 PM	Main Vac valve opened
4/19/2011	1:03:01 PM	Bypass valve opened
4/19/2011	1:03:01 PM	Helium MFC set to  0.000000
4/19/2011	1:03:01 PM	H2 MFC set to  0.000000
4/19/2011	1:03:01 PM	BCl3 MFC set to  0.000000
4/19/2011	1:03:01 PM	PHl3 MFC set to  0.000000
4/19/2011	1:03:01 PM	SiCl4 MFC set to  0.000000
4/19/2011	1:03:01 PM	Bypass solenoid MFC set to  0.000000
4/19/2011	1:03:02 PM	Tube furnace set to 0
4/19/2011	1:04:02 PM	H2 valve closed
4/19/2011	1:04:02 PM	BCl3 valve closed
4/19/2011	1:04:02 PM	PH3 valve closed
4/19/2011	1:04:02 PM	SiCl4 pre valve closed
4/19/2011	1:04:02 PM	SiCl4 post valve closed
4/19/2011	1:04:02 PM	Bubbler valve closed
4/19/2011	1:04:02 PM	Helium valve opened
4/19/2011	1:04:02 PM	Main Vac valve opened
4/19/2011	1:04:02 PM	Bypass valve opened
4/19/2011	1:04:02 PM	Helium MFC set to  100.000000
4/19/2011	1:04:02 PM	H2 MFC set to  0.000000
4/19/2011	1:04:02 PM	BCl3 MFC set to  0.000000
4/19/2011	1:04:02 PM	PHl3 MFC set to  0.000000
4/19/2011	1:04:02 PM	SiCl4 MFC set to  0.000000
4/19/2011	1:04:02 PM	Bypass solenoid MFC set to  0.000000
4/19/2011	1:04:02 PM	Tube furnace set to 0
4/19/2011	1:05:02 PM	Helium valve closed
4/19/2011	1:05:02 PM	H2 valve closed
4/19/2011	1:05:02 PM	BCl3 valve closed
4/19/2011	1:05:02 PM	PH3 valve closed
4/19/2011	1:05:02 PM	SiCl4 pre valve closed
4/19/2011	1:05:02 PM	SiCl4 post valve closed
4/19/2011	1:05:02 PM	Bubbler valve closed
4/19/2011	1:05:02 PM	Main Vac valve opened
4/19/2011	1:05:02 PM	Bypass valve opened
4/19/2011	1:05:02 PM	Helium MFC set to  0.000000
4/19/2011	1:05:02 PM	H2 MFC set to  0.000000
4/19/2011	1:05:02 PM	BCl3 MFC set to  0.000000
4/19/2011	1:05:02 PM	PHl3 MFC set to  0.000000
4/19/2011	1:05:02 PM	SiCl4 MFC set to  0.000000
4/19/2011	1:05:02 PM	Bypass solenoid MFC set to  0.000000
4/19/2011	1:05:02 PM	Tube furnace set to 0
4/19/2011	1:06:02 PM	H2 valve closed
4/19/2011	1:06:02 PM	BCl3 valve closed
4/19/2011	1:06:02 PM	PH3 valve closed
4/19/2011	1:06:02 PM	SiCl4 pre valve closed
4/19/2011	1:06:02 PM	SiCl4 post valve closed
4/19/2011	1:06:02 PM	Bubbler valve closed
4/19/2011	1:06:02 PM	Helium valve opened
4/19/2011	1:06:02 PM	Main Vac valve opened
4/19/2011	1:06:02 PM	Bypass valve opened
4/19/2011	1:06:02 PM	Helium MFC set to  100.000000
4/19/2011	1:06:02 PM	H2 MFC set to  0.000000
4/19/2011	1:06:02 PM	BCl3 MFC set to  0.000000
4/19/2011	1:06:02 PM	PHl3 MFC set to  0.000000
4/19/2011	1:06:02 PM	SiCl4 MFC set to  0.000000
4/19/2011	1:06:02 PM	Bypass solenoid MFC set to  0.000000
4/19/2011	1:06:02 PM	Tube furnace set to 0
4/19/2011	1:07:02 PM	Helium valve closed
4/19/2011	1:07:02 PM	H2 valve closed
4/19/2011	1:07:02 PM	BCl3 valve closed
4/19/2011	1:07:02 PM	PH3 valve closed
4/19/2011	1:07:02 PM	SiCl4 pre valve closed
4/19/2011	1:07:02 PM	SiCl4 post valve closed
4/19/2011	1:07:02 PM	Bubbler valve closed
4/19/2011	1:07:02 PM	Main Vac valve opened
4/19/2011	1:07:02 PM	Bypass valve opened
4/19/2011	1:07:02 PM	Helium MFC set to  0.000000
4/19/2011	1:07:02 PM	H2 MFC set to  0.000000
4/19/2011	1:07:02 PM	BCl3 MFC set to  0.000000
4/19/2011	1:07:02 PM	PHl3 MFC set to  0.000000
4/19/2011	1:07:02 PM	SiCl4 MFC set to  0.000000
4/19/2011	1:07:02 PM	Bypass solenoid MFC set to  0.000000
4/19/2011	1:07:02 PM	Tube furnace set to 0
4/19/2011	1:08:02 PM	H2 valve closed
4/19/2011	1:08:02 PM	BCl3 valve closed
4/19/2011	1:08:02 PM	PH3 valve closed
4/19/2011	1:08:02 PM	SiCl4 pre valve closed
4/19/2011	1:08:02 PM	SiCl4 post valve closed
4/19/2011	1:08:02 PM	Bubbler valve closed
4/19/2011	1:08:02 PM	Helium valve opened
4/19/2011	1:08:02 PM	Main Vac valve opened
4/19/2011	1:08:02 PM	Bypass valve opened
4/19/2011	1:08:02 PM	Helium MFC set to  100.000000
4/19/2011	1:08:02 PM	H2 MFC set to  0.000000
4/19/2011	1:08:02 PM	BCl3 MFC set to  0.000000
4/19/2011	1:08:02 PM	PHl3 MFC set to  0.000000
4/19/2011	1:08:02 PM	SiCl4 MFC set to  0.000000
4/19/2011	1:08:02 PM	Bypass solenoid MFC set to  0.000000
4/19/2011	1:08:03 PM	Tube furnace set to 0
4/19/2011	1:09:03 PM	Helium valve closed
4/19/2011	1:09:03 PM	H2 valve closed
4/19/2011	1:09:03 PM	BCl3 valve closed
4/19/2011	1:09:03 PM	PH3 valve closed
4/19/2011	1:09:03 PM	SiCl4 pre valve closed
4/19/2011	1:09:03 PM	SiCl4 post valve closed
4/19/2011	1:09:03 PM	Bubbler valve closed
4/19/2011	1:09:03 PM	Main Vac valve opened
4/19/2011	1:09:03 PM	Bypass valve opened
4/19/2011	1:09:03 PM	Helium MFC set to  0.000000
4/19/2011	1:09:03 PM	H2 MFC set to  0.000000
4/19/2011	1:09:03 PM	BCl3 MFC set to  0.000000
4/19/2011	1:09:03 PM	PHl3 MFC set to  0.000000
4/19/2011	1:09:03 PM	SiCl4 MFC set to  0.000000
4/19/2011	1:09:03 PM	Bypass solenoid MFC set to  0.000000
4/19/2011	1:09:03 PM	Tube furnace set to 0
4/19/2011	1:10:03 PM	H2 valve closed
4/19/2011	1:10:03 PM	BCl3 valve closed
4/19/2011	1:10:03 PM	PH3 valve closed
4/19/2011	1:10:03 PM	SiCl4 pre valve closed
4/19/2011	1:10:03 PM	SiCl4 post valve closed
4/19/2011	1:10:03 PM	Bubbler valve closed
4/19/2011	1:10:03 PM	Helium valve opened
4/19/2011	1:10:03 PM	Main Vac valve opened
4/19/2011	1:10:03 PM	Bypass valve opened
4/19/2011	1:10:03 PM	Helium MFC set to  100.000000
4/19/2011	1:10:03 PM	H2 MFC set to  0.000000
4/19/2011	1:10:03 PM	BCl3 MFC set to  0.000000
4/19/2011	1:10:03 PM	PHl3 MFC set to  0.000000
4/19/2011	1:10:03 PM	SiCl4 MFC set to  0.000000
4/19/2011	1:10:03 PM	Bypass solenoid MFC set to  0.000000
4/19/2011	1:10:03 PM	Tube furnace set to 0
4/19/2011	1:11:03 PM	Helium valve closed
4/19/2011	1:11:03 PM	H2 valve closed
4/19/2011	1:11:03 PM	BCl3 valve closed
4/19/2011	1:11:03 PM	PH3 valve closed
4/19/2011	1:11:03 PM	SiCl4 pre valve closed
4/19/2011	1:11:03 PM	SiCl4 post valve closed
4/19/2011	1:11:03 PM	Bubbler valve closed
4/19/2011	1:11:03 PM	Main Vac valve opened
4/19/2011	1:11:03 PM	Bypass valve opened
4/19/2011	1:11:03 PM	Helium MFC set to  0.000000
4/19/2011	1:11:03 PM	H2 MFC set to  0.000000
4/19/2011	1:11:03 PM	BCl3 MFC set to  0.000000
4/19/2011	1:11:03 PM	PHl3 MFC set to  0.000000
4/19/2011	1:11:03 PM	SiCl4 MFC set to  0.000000
4/19/2011	1:11:03 PM	Bypass solenoid MFC set to  0.000000
4/19/2011	1:11:03 PM	Tube furnace set to 0
4/19/2011	1:12:03 PM	H2 valve closed
4/19/2011	1:12:03 PM	BCl3 valve closed
4/19/2011	1:12:03 PM	PH3 valve closed
4/19/2011	1:12:03 PM	SiCl4 pre valve closed
4/19/2011	1:12:03 PM	SiCl4 post valve closed
4/19/2011	1:12:03 PM	Bubbler valve closed
4/19/2011	1:12:03 PM	Helium valve opened
4/19/2011	1:12:03 PM	Main Vac valve opened
4/19/2011	1:12:03 PM	Bypass valve opened
4/19/2011	1:12:03 PM	Helium MFC set to  100.000000
4/19/2011	1:12:03 PM	H2 MFC set to  0.000000
4/19/2011	1:12:03 PM	BCl3 MFC set to  0.000000
4/19/2011	1:12:03 PM	PHl3 MFC set to  0.000000
4/19/2011	1:12:03 PM	SiCl4 MFC set to  0.000000
4/19/2011	1:12:03 PM	Bypass solenoid MFC set to  0.000000
4/19/2011	1:12:03 PM	Tube furnace set to 0
4/19/2011	1:13:03 PM	Helium valve closed
4/19/2011	1:13:03 PM	H2 valve closed
4/19/2011	1:13:03 PM	BCl3 valve closed
4/19/2011	1:13:03 PM	PH3 valve closed
4/19/2011	1:13:03 PM	SiCl4 pre valve closed
4/19/2011	1:13:03 PM	SiCl4 post valve closed
4/19/2011	1:13:03 PM	Bubbler valve closed
4/19/2011	1:13:03 PM	Main Vac valve opened
4/19/2011	1:13:03 PM	Bypass valve opened
4/19/2011	1:13:03 PM	Helium MFC set to  0.000000
4/19/2011	1:13:03 PM	H2 MFC set to  0.000000
4/19/2011	1:13:03 PM	BCl3 MFC set to  0.000000
4/19/2011	1:13:03 PM	PHl3 MFC set to  0.000000
4/19/2011	1:13:03 PM	SiCl4 MFC set to  0.000000
4/19/2011	1:13:03 PM	Bypass solenoid MFC set to  0.000000
4/19/2011	1:13:04 PM	Tube furnace set to 0
4/19/2011	1:13:05 PM	Run finished at 1:13 PM
4/19/2011	1:13:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/19/2011	1:17:19 PM	Recipe started at 1:17 PM
4/19/2011	1:17:19 PM	BCl3 valve closed
4/19/2011	1:17:19 PM	PH3 valve closed
4/19/2011	1:17:19 PM	SiCl4 pre valve closed
4/19/2011	1:17:19 PM	SiCl4 post valve closed
4/19/2011	1:17:19 PM	Main Vac valve closed
4/19/2011	1:17:19 PM	Bypass valve closed
4/19/2011	1:17:19 PM	Bubbler valve closed
4/19/2011	1:17:19 PM	Helium valve opened
4/19/2011	1:17:19 PM	H2 valve opened
4/19/2011	1:17:19 PM	Helium MFC set to  190.000000
4/19/2011	1:17:19 PM	H2 MFC set to  10.000000
4/19/2011	1:17:19 PM	BCl3 MFC set to  0.000000
4/19/2011	1:17:19 PM	PHl3 MFC set to  0.000000
4/19/2011	1:17:19 PM	SiCl4 MFC set to  0.000000
4/19/2011	1:17:19 PM	Bypass solenoid MFC set to  0.000000
4/19/2011	1:17:19 PM	Tube furnace set to 0
4/19/2011	1:20:43 PM	BCl3 valve closed
4/19/2011	1:20:43 PM	PH3 valve closed
4/19/2011	1:20:43 PM	SiCl4 pre valve closed
4/19/2011	1:20:43 PM	SiCl4 post valve closed
4/19/2011	1:20:43 PM	Main Vac valve closed
4/19/2011	1:20:43 PM	Bypass valve closed
4/19/2011	1:20:43 PM	Helium valve opened
4/19/2011	1:20:43 PM	H2 valve opened
4/19/2011	1:20:43 PM	Bubbler valve opened
4/19/2011	1:20:43 PM	Helium MFC set to  47.500000
4/19/2011	1:20:43 PM	H2 MFC set to  2.500000
4/19/2011	1:20:43 PM	BCl3 MFC set to  0.000000
4/19/2011	1:20:43 PM	PHl3 MFC set to  0.000000
4/19/2011	1:20:43 PM	SiCl4 MFC set to  0.000000
4/19/2011	1:20:43 PM	Bypass solenoid MFC set to  0.000000
4/19/2011	1:20:43 PM	Tube furnace set to 350
4/19/2011	11:56:26 PM	Run aborted at 11:56 PM
4/19/2011	11:56:26 PM	Helium valve closed
4/19/2011	11:56:26 PM	H2 valve closed
4/19/2011	11:56:26 PM	BCl3 valve closed
4/19/2011	11:56:26 PM	PH3 valve closed
4/19/2011	11:56:26 PM	SiCl4 pre valve closed
4/19/2011	11:56:26 PM	SiCl4 post valve closed
4/19/2011	11:56:26 PM	Bypass valve closed
4/19/2011	11:56:26 PM	Main Vac valve closed
4/19/2011	11:56:26 PM	Bubbler valve closed
4/19/2011	11:56:26 PM	Helium MFC set to  0.000000
4/19/2011	11:56:26 PM	H2 MFC set to  0.000000
4/19/2011	11:56:26 PM	BCl3 MFC set to  0.000000
4/19/2011	11:56:26 PM	PHl3 MFC set to  0.000000
4/19/2011	11:56:26 PM	SiCl4 MFC set to  0.000000
4/19/2011	11:56:27 PM	Tube furnace set to 0
